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Mixing effect on a nonequilibrium RF induction plasma

✍ Scribed by H. Nishiyama; Takehiko Sato; S. Ito; Takeshi Sato; S. Kamiyama

Publisher: Springer-Verlag
Year: 2000
Tongue: English
Weight: 229 KB
Volume: 36
Category: Article
ISSN: 1432-1181
DOI: 10.1007/s002310000102

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