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Miniature RF Test Structure for On-Wafer Device Testing and In-Line Process Monitoring

✍ Scribed by Ming-Hsiang Cho; Lee, R.; An-Sam Peng; Chen, D.; Chune-Sin Yeh; Lin-Kun Wu

Book ID: 114619038
Publisher: IEEE
Year: 2008
Tongue: English
Weight: 494 KB
Volume: 55
Category: Article
ISSN: 0018-9383
DOI: 10.1109/ted.2007.911037

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