An RF MEMs microelectromechanical system variable capacitor has been demonstrated with a 22:1 tuning range, tuning from 1.5 to 33.2 pF of capacitance. This capacitor was constructed using bistable MEMs membrane capacitors with individual tuning ranges of 70:1 to 100:1, control voltages in the 30-55
Miniature and tunable filters using MEMS capacitors
โ Scribed by Abbaspour-Tamijani, A.; Dussopt, L.; Rebeiz, G.M.
- Book ID
- 111924167
- Publisher
- IEEE
- Year
- 2003
- Tongue
- English
- Weight
- 615 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0018-9480
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