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Microvoids in a-Si:H and a-SiGe:H alloys

✍ Scribed by S. Muramatsu; R. Suzuki; L. Wei; S. Tanigawa

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 347 KB
Volume: 34
Category: Article
ISSN: 0927-0248
DOI: 10.1016/0927-0248(94)90081-7

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