Microstructure of silicon-incorporated carbon films with various silicon concentrations deposited by hybrid magnetron sputtering/chemical vapor deposition

✍ Scribed by Cheng, Hsin-Chung; Wang, Duen-Jeng; Lan, Wen-Chien; Wang, Pei-Yi; Ou, Shih-Fu; Hsu, Ya-Ju; Ou, Keng-Liang

• Book ID: 121453756
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 813 KB
• Volume: 39
• Category: Article
• ISSN: 0272-8842
• DOI: 10.1016/j.ceramint.2012.12.073