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Microstructure of Mo/Si multilayers with B_4C diffusion barrier layers

✍ Scribed by Nedelcu, Ileana ;van de Kruijs, Robbert W. E. ;Yakshin, Andrey E. ;Bijkerk, Fred

Book ID
115354102
Publisher
The Optical Society
Year
2009
Tongue
English
Weight
721 KB
Volume
48
Category
Article
ISSN
1559-128X

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Thermally induced decomposition of B4C b
Thermally induced decomposition of B4C barrier layers in Mo/Si multilayer structures
✍ S. Bruijn; R.W.E. van de Kruijs; A.E. Yakshin; E. Zoethout; F. Bijkerk πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 515 KB

We investigate the influence of the Mo crystalline state (quasi-amorphous or crystalline) on the thermal stability of Mo/Si thin film multilayers with B 4 C diffusion barrier layers at either of the two interfaces. We find that multilayers containing amorphous Mo layers are more stable than those co