Layer-by-layer design method for multilayers with barrier layers: application to Si/Mo multilayers for extreme-ultraviolet lithography

✍ Scribed by Larruquert, Juan I.

• Book ID: 115390033
• Publisher: Optical Society of America
• Year: 2004
• Tongue: English
• Weight: 187 KB
• Volume: 21
• Category: Article
• ISSN: 1084-7529
• DOI: 10.1364/JOSAA.21.001750