Design of the chirped Mo/Si multilayer mirror with SiC capping layer in extreme ultraviolet region

✍ Scribed by Wang, Feng-li; Liu, Lei; Li, Wen-bin; Zhu, Jing-tao; Zhang, Zhong; Wang, Zhan-shan; Chen, Ling-yan

• Book ID: 118453485
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 449 KB
• Volume: 123
• Category: Article
• ISSN: 0030-4026
• DOI: 10.1016/j.ijleo.2011.10.036