✦ LIBER ✦
High performance La/B4C multilayer mirrors with barrier layers for the next generation lithography
✍ Scribed by Chkhalo, N. I.; Künstner, S.; Polkovnikov, V. N.; Salashchenko, N. N.; Schäfers, F.; Starikov, S. D.
- Book ID
- 118250836
- Publisher
- American Institute of Physics
- Year
- 2013
- Tongue
- English
- Weight
- 812 KB
- Volume
- 102
- Category
- Article
- ISSN
- 0003-6951
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