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Microstructure in copper interconnects – Influence of plating additive concentration

✍ Scribed by Jürgen Neuner; Inka Zienert; Anita Peeva; Axel Preuße; Peter Kücher; Johann W. Bartha


Book ID
104052432
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
436 KB
Volume
87
Category
Article
ISSN
0167-9317

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