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Microstructure and surface roughness of microcrystalline silicon prepared by very high frequency-glow discharge using hydrogen dilution

โœ Scribed by E Vallat-Sauvain; U Kroll; J Meier; N Wyrsch; A Shah


Book ID
117150300
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
899 KB
Volume
266-269
Category
Article
ISSN
0022-3093

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