Evolution of the microstructure in microcrystalline silicon prepared by very high frequency glow-discharge using hydrogen dilution

✍ Scribed by Vallat-Sauvain, E.; Kroll, U.; Meier, J.; Shah, A.; Pohl, J.

• Book ID: 120043621
• Publisher: American Institute of Physics
• Year: 2000
• Tongue: English
• Weight: 748 KB
• Volume: 87
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.372311