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Microstructure and morphology of SiOx film deposited by APCVD

✍ Scribed by Ji-liang Zhang; Jian Li; Lai-ma Luo; Yin-hua Wo


Book ID
116603440
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
920 KB
Volume
469
Category
Article
ISSN
0925-8388

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