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Structural and Optical Properties of SiOx Films Deposited by HFCVD

✍ Scribed by J. A. Luna López; G. García Salgado; A. Ponce Pedraza; D. E. Vázquez Valerdi; J. Carrillo López; A. Morales Sánchez; T. Díaz Becerril; E. Rosendo Andrés; H. Juárez Santiesteban

Book ID: 119355560
Publisher: Elsevier
Year: 2011
Tongue: English
Weight: 878 KB
Volume: 25
Category: Article
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2011.12.075

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