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FTIR, AFM and PL properties of thin SiOx films deposited by HFCVD

✍ Scribed by J.A. Luna-López; G. García-Salgado; T. Díaz-Becerril; J. Carrillo López; D.E. Vázquez-Valerdi; H. Juárez-Santiesteban; E. Rosendo-Andrés; A. Coyopol


Book ID
108215781
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
581 KB
Volume
174
Category
Article
ISSN
0921-5107

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