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Microstructure and Mechanical Properties of Electrodeposited Thin Nickel Films

โœ Scribed by M. O. Kostin; O. H. Sheikina


Book ID
111540229
Publisher
Springer
Year
2002
Tongue
English
Weight
222 KB
Volume
38
Category
Article
ISSN
1573-885X

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In this article we present microstructural investigations of electrodeposited CuAg-alloy metallization thin films. The deposition was carried out on Si(100) / SiO / Ta / TaN / Cu-seed substrates at room temperature without any additives. It was 2 found that the mean grain size decreases with increas