Motivated by the success of transition metal nanocomposite hard coatings, a new optically transparent coating based on the Al-Si-N ternary system was developed. Al-Si-N thin films were deposited by reactive DC magnetron co-sputtering of Al and Si targets in an Ar/N 2 atmosphere at 200 Β°C and 500 Β°C
β¦ LIBER β¦
Microstructural characterization of N, Ti mixed coatings deposited by plasma based ion implantation and magnetron sputtering deposition
β Scribed by Xinxin Ma; Renchao Che; Mingren Sun; Yue Sun; Lifang Xia; Xiaodong Li
- Book ID
- 110241238
- Publisher
- Springer
- Year
- 2000
- Tongue
- English
- Weight
- 409 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0261-8028
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