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Microstructural changes in silicon induced by patterning with focused ion beams of Ga, Si and Au

✍ Scribed by Chee, See Wee; Kammler, Martin; Balasubramanian, Prabhu; Reuter, Mark C.; Hull, Robert; Ross, Frances M.

Book ID: 121467623
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 889 KB
Volume: 127
Category: Article
ISSN: 0304-3991
DOI: 10.1016/j.ultramic.2012.07.004

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