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In situ patterning of Si3N4 by an ion-beam-induced gas surface reaction

✍ Scribed by Zheng Xu; Kenji Gamo; Takao Shiokawa; Susumu Namba

Book ID: 113280278
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 360 KB
Volume: 39
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(89)90890-2

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