Microstructural analysis of NiInGe ohmic contacts for n-type GaAs
β Scribed by Yukito Tsunoda; Masanori Murakami
- Book ID
- 107452830
- Publisher
- Springer US
- Year
- 2002
- Tongue
- English
- Weight
- 252 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0361-5235
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π SIMILAR VOLUMES
The open-tube diffusion of zinc is used for the preparation of p-type layers in gallium arsenide. The process provides the capability of forming reproducible deep diffusions (0.4-2 l~m) over short diffusion times and in the temperature range 600-650 ~ TiPdAu contacts are prepared on these layers. Us
## Abstract The microstructural and electrical properties of Ti/Re/Au (10 nm/10 nm/50 nm) ohmic contacts to moderately doped nβtype GaN (4.0 Γ 10^18^ cm^β3^) have been investigated by currentβvoltage (__I__ β__V__), Auger electron microscopy (AES) and transmission electron microscopy (TEM). The ele