Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

✍ Scribed by Xiao-Sheng Zhang (auth.)

• Publisher: Springer-Verlag Berlin Heidelberg
• Year: 2016
• Tongue: English
• Leaves: 137
• Series: Springer Theses
• Edition: 1
• Category: Library

✦ Synopsis

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.

✦ Table of Contents

Front Matter....Pages i-xx
Introduction....Pages 1-21
Micro-/Nanointegrated Fabrication Technique for Silicon....Pages 23-47
Micro-/Nanointegrated Fabrication Technique for Flexible Materials....Pages 49-74
Flexible Triboelectric Nanogenerators: Principle and Fabrication....Pages 75-91
Flexible Triboelectric Nanogenerators: Enhancement and Applications....Pages 93-117
Summary and Perspectives....Pages 119-122

✦ Subjects

Nanotechnology and Microengineering; Microengineering; Energy Harvesting; Electronics and Microelectronics, Instrumentation; Nanotechnology