This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, a
Micro and Nano Fabrication Technology
β Scribed by Jiwang Yan
- Publisher
- Springer Singapore
- Year
- 2018
- Tongue
- English
- Leaves
- 956
- Series
- Micro/Nano Technologies
- Edition
- 1st ed.
- Category
- Library
No coin nor oath required. For personal study only.
β¦ Subjects
Engineering; Nanotechnology and Microengineering; Nanotechnology; Medicine/Public Health, general; Biomedical Engineering
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