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Micro and Nano Fabrication: Tools and Processes

✍ Scribed by Hans H. Gatzen, Volker Saile, Jürg Leuthold

Publisher
Springer-Verlag Berlin Heidelberg
Year
2015
Tongue
English
Leaves
537
Edition
1
Category
Library
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✦ Synopsis

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

✦ Table of Contents

Front Matter....Pages i-xxvi
Introduction—MEMS, a Historical Perspective....Pages 1-5
Vacuum Technology....Pages 7-63
Deposition Technologies....Pages 65-203
Etching Technologies....Pages 205-272
Doping and Surface Modification....Pages 273-312
Lithography....Pages 313-395
LIGA....Pages 397-408
Nanofabrication by Self-Assembly....Pages 409-423
Enabling Technologies I—Wafer Planarization and Bonding....Pages 425-453
Enabling Technologies II—Contamination Control....Pages 455-494
Device Fabrication—An Example....Pages 495-512
Back Matter....Pages 513-519

✦ Subjects

Nanotechnology and Microengineering; Manufacturing, Machines, Tools; Operating Procedures, Materials Treatment

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