In this paper, we present a nucromachmed diaphragm structure for integrated ultrasound transducers Tlus structure greatly reduces the parasltlc capacitance between the lower electrode and the conductive Sl substrate m a nommcromachmed structure The rmcromachlmng lmproves both senslfinty and nummum d
โฆ LIBER โฆ
Micromachining for improvement of integrated ultrasonic transducer sensitivity
โ Scribed by Mo, J.-H.; Robinson, A.L.; Fitting, D.W.; Terry, F.L., Jr.; Carson, P.L.
- Book ID
- 114536248
- Publisher
- IEEE
- Year
- 1990
- Tongue
- English
- Weight
- 704 KB
- Volume
- 37
- Category
- Article
- ISSN
- 0018-9383
- DOI
- 10.1109/16.43810
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