Improvement of integrated utrasonic transducer sensitivity

✍ Scribed by Jian-Hua Mo; Andrew L. Robinson; Fred L. Terry Jr.; Dale W. Fitting; Paul L. Carson

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 580 KB
• Volume: 22
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(89)80057-3

✦ Synopsis

In this paper, we present a nucromachmed diaphragm structure for integrated ultrasound transducers Tlus structure greatly reduces the parasltlc capacitance between the lower electrode and the conductive Sl substrate m a nommcromachmed structure The rmcromachlmng lmproves both senslfinty and nummum detectable signal It also reduces crosstalk between transducer elements