✦ LIBER ✦
Micromachined beam-diaphragm structure improves performances of pressure transducer
✍ Scribed by Bao Min-Hang; Yu Lian-Zhong; Wang Yan
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 668 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0924-4247
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