๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Micromachined ion-selective electrodes with polymer matrix membranes

โœ Scribed by M. Knoll; K. Cammann; C. Dumschat; J. Eshold; C. Sundermeier

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
779 KB
Volume
21
Category
Article
ISSN
0925-4005

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โœฆ Synopsis

We have developed a new method for the integration of ion-sensitive membranes and silicon sensor chips. The ion-sensitive membrane is deposited in pyramidal containments produced on silicon by an anisotropic etching technique. Here we demonstrate the application of this method to the development of nitrate-sensitive sensors. PVC membranes are cast into the membrane containment. The sensors show an improved mechanical stability and lifetime compared to ISFETs. Slopes, detection limits and selectivities of the containment sensors are similar to those of ion-selective electrodes with internal electrolyte solution using the same membrane composition. The results of the drift and hysteresis measurements are sutficiently good for most practical applications.

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