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Micromachined infrared sensors using tunneling displacement transducers

✍ Scribed by Kenny, T. W.; Reynolds, J. K.; Podosek, J. A.; Vote, E. C.; Miller, L. M.; Rockstad, H. K.; Kaiser, W. J.

Book ID: 120572149
Publisher: American Institute of Physics
Year: 1996
Tongue: English
Weight: 916 KB
Volume: 67
Category: Article
ISSN: 0034-6748
DOI: 10.1063/1.1146559

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