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[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - A comparison between micromachined pressure sensors using quartz or silicon vibrating beams

✍ Scribed by Dufour, M.; Delaye, M.T.; Michel, F.; Danel, J.S.; Diem, B.; Delapierre, G.

Book ID: 120972915
Publisher: IEEE
Year: 1991
Weight: 368 KB
Category: Article
ISBN-13: 9780879425852
DOI: 10.1109/SENSOR.1991.148969

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