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[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - Large deflection performance of surface micromachined corrugated diaphragms

✍ Scribed by van Mullem, C.J.; Gabriel, K.J.; Fujita, H.

Book ID: 120256819
Publisher: IEEE
Year: 1991
Weight: 358 KB
Category: Article
ISBN-13: 9780879425852
DOI: 10.1109/SENSOR.1991.149066

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