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[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - Flexible silicon interconnects for microelectromechanical systems

✍ Scribed by Hetke, J.F.; Najafi, K.; Wise, K.D.

Book ID: 121736422
Publisher: IEEE
Year: 1991
Tongue: English
Weight: 493 KB
Category: Article
ISBN-13: 9780879425852
DOI: 10.1109/SENSOR.1991.148994

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