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Microhardness testing of molybdenum irradiated by He ions

✍ Scribed by Akira Hasegawa; Katsunori Abe; Shotaro Morozumi


Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
397 KB
Volume
133-134
Category
Article
ISSN
0022-3115

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Re-crystallization of Mn implanted GaAs
✍ C.H. Chen; H. Niu; C.Y. Cheng; H.H. Hsieh; S.C. Wu πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 297 KB

Mn ions were implanted into p-GaAs:Zn substrates at room temperature. Post-annealing was performed using 350 keV He + ion irradiation at a temperature of 150-250 Β°C. The structure of the films before and after annealing was characterized by X-ray diffraction. The depth profiles of the implanted Mn +