Secondary Ions Produced by Low-energy Im
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T. Sato; A. Shimizu; K. Nakamura; K. Hiraoka
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Article
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1997
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John Wiley and Sons
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English
โ 187 KB
๐ 1 views
Secondary ions produced by low-energy He + and Ne + ion impact on van der Waals solid thin films deposited on a silicon substrate were measured as a function of film thickness using a reflectron-type time-of-flight mass spectrometer. The intensities of secondary ions N + and N 3 + produced by 400 eV