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Microhardness of TiNx coatings obtained by reactive cathodic sputtering

โœ Scribed by J. Chevallier; J.P. Chabert


Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
49 KB
Volume
80
Category
Article
ISSN
0040-6090

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Synthesis and characterization of titani
โœ G. Meunier; J.P. Manaud; P. Grall ๐Ÿ“‚ Article ๐Ÿ“… 1993 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 354 KB

Thin films of titanium hydride were obtained by reactive cathodic sputtering with a titanium target using different compositions of a mixture of hydrogen and argon as sputtering gas. The layered material is quite different from the bulk material: only a poorly crystallized phase with formula Till,.