Synthesis and characterization of titani
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G. Meunier; J.P. Manaud; P. Grall
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Article
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1993
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Elsevier Science
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English
โ 354 KB
Thin films of titanium hydride were obtained by reactive cathodic sputtering with a titanium target using different compositions of a mixture of hydrogen and argon as sputtering gas. The layered material is quite different from the bulk material: only a poorly crystallized phase with formula Till,.