𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Microfabrication techniques using focused ion beams and emergent applications

✍ Scribed by M.J Vasile; R Nassar; J Xie; H Guo

Book ID
104369178
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
629 KB
Volume
30
Category
Article
ISSN
0968-4328

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✦ Synopsis

The application of focused ion beam (FIB) machining in several technologies aimed at microstructure fabrication is presented. These emergent applications include the production of micromilling tools for machining of metals and the production of microsurgical tools. An example of the use of microsurgical manipulators in a circulatory system measurement is presented. The steps needed to transform the laboratory fabrication of these tools and manipulators into a routine FIB production process are discussed. The ion milling of threedimensional cavities by the exact solution of a mathematical model of the FIB deflection is demonstrated. A good agreement between the model calculation and the ion beam control has been obtained for parabolic and cosine cross-section features with planes of symmetry.

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✍ Richard M. Langford πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 483 KB

## Abstract Focused ion beam and dual platform systems have, over the last 10 years, become a main stay of sample preparation for material analysis. In this article the merits of using these systems are discussed and the three main techniques used to prepare cross‐section specimens for transmission