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Microfabrication of diamond films: selective deposition and etching

โœ Scribed by S. Miyauchi; K. Kumagai; K. Miyata; K. Nishimura; K. Kobashi; A. Nakaue; Jeffrey T. Glass; Ian M. Buckley-Golder

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
410 KB
Volume
47
Category
Article
ISSN
0257-8972

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