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Effect of diluent gases added during deposition on the etching characteristics of diamond-like carbon films

✍ Scribed by Jayshree Seth; Raghunath Padiyath; Suryadevara V. Babu; Moses David


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
444 KB
Volume
212
Category
Article
ISSN
0040-6090

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