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Effect of dilution gases in methane on the deposition of diamond-like carbon in a microwave discharge III: Effect of rare gases

โœ Scribed by Fumitaka Hayashi; Haruo Uyama; Osamu Matsumoto


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
531 KB
Volume
189
Category
Article
ISSN
0040-6090

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