Microelectromechanical Systems (MEMS) Based-Ultrasonic Electrostatic Actuators on a Flexible Substrate

✍ Scribed by Kim, Sangpyeong; Zhang, Xu; Daugherty, Robin; Lee, Ed; Kunnen, George; Allee, David R.; Forsythe, Eric; Chae, Junseok

• Book ID: 120595521
• Publisher: IEEE
• Year: 2012
• Tongue: English
• Weight: 373 KB
• Volume: 33
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/LED.2012.2195630