A dynamic stress analyzer for microelectromechanical systems (MEMS) based on Raman spectroscopy

✍ Scribed by Chenyang Xue; Lina Zheng; Wendong Zhang; Binzhen Zhang; Aoqun Jian

• Publisher: John Wiley and Sons
• Year: 2007
• Tongue: English
• Weight: 116 KB
• Volume: 38
• Category: Article
• ISSN: 0377-0486
• DOI: 10.1002/jrs.1673