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Micro molding for double-sided micro structuring of SU-8 resist

✍ Scribed by Oerke, A.; Büttgenbach, S.; Dietzel, A.


Book ID
121595307
Publisher
Springer-Verlag
Year
2013
Tongue
English
Weight
501 KB
Volume
20
Category
Article
ISSN
0946-7076

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