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Micro-inductors integrated on silicon for power supply on chip

✍ Scribed by Ningning Wang; Terence O’Donnell; Saibal Roy; Paul McCloskey; Cian O’Mathuna

Book ID
113724589
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
893 KB
Volume
316
Category
Article
ISSN
0304-8853

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## Abstract We present physics‐based modeling for silicon on‐chip spiral inductors, taking into account the coupling capacitance between metal spirals. The coupling capacitance __C__~__p__~ is calculated using a distributed‐capacitance model based on finite‐element analysis. As demonstrated for a s