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RF inductors and capacitors integrated on silicon chip by CMOS compatible Cu interconnect technology

✍ Scribed by Guo Lihui; Yu Mingbin; Foo Pang Dow

Book ID: 108361951
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 215 KB
Volume: 43
Category: Article
ISSN: 0026-2714
DOI: 10.1016/s0026-2714(02)00344-x

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