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Micro-electro-mechanical deformable mirrors for aberration control in optical systems

✍ Scribed by Michael C. Roggemann; Victor M. Bright; Byron M. Welsh; William D. Cowan; Max Lee


Book ID
110244689
Publisher
Springer
Year
1999
Tongue
English
Weight
178 KB
Volume
31
Category
Article
ISSN
0306-8919

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## Abstract Double‐barrier quantum‐well resonant tunneling heterostructures of GaAs/In~0.1~Ga~0.9~As/AlAs have been used as pressure‐sensing elements of designed micro‐electro‐mechanical systems. The static experiments have been conducted on the heterostructure, in both positive and negative differ