High-speed scanning fiber-optic heterodyne interferometer using a micro-electro-mechanical system mirror and an f-theta lens

✍ Scribed by Long Gao; Chunhui Wang; Yiqin Ji; Yanchao Li; Yang Qu

• Publisher: Optical Society of Japan
• Year: 2011
• Tongue: English
• Weight: 454 KB
• Volume: 18
• Category: Article
• ISSN: 1340-6000
• DOI: 10.1007/s10043-011-0085-0