Micro cantilever probe array integrated with Piezoresistive sensor

✍ Scribed by Zunxian Yang; Xinxin Li; Yuelin Wang; Haifei Bao; Min Liu

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 264 KB
• Volume: 35
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/j.mejo.2003.12.001