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Characterization of a cantilever with an integrated deflection sensor

✍ Scribed by R. Linnemann; T. Gotszalk; L. Hadjiiski; I.W. Rangelow

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 770 KB
Volume: 264
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(94)05829-6

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