Arrays of SU-8 microcantilevers with integrated piezoresistive sensors for parallel AFM applications

✍ Scribed by Andreas Schneider; Robert H. Ibbotson; Richard J. Dunn; Ejaz Huq

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 585 KB
• Volume: 88
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2010.11.047