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Micro and nano patterning by focused ion beam enhanced adhesion

✍ Scribed by Neeraj Shukla; Sarvesh K. Tripathi; Mihir Sarkar; Nitul S. Rajput; Vishwas N. Kulkarni

Book ID
103863270
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
874 KB
Volume
267
Category
Article
ISSN
0168-583X

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Both focused electron and ion beams (FEB and FIB) were used for fabricating patterned nano-/micro-structures on the surfaces of an iron phosphate glass (FePO). Periodically arranged, nano-sized holes/tubes/rings with their walls being made of Fe nanoparticles were fabricated by FEB direct writing. T