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Fabrication of nano-/micro-patterns on iron phosphate glass surfaces by focused energetic beams

✍ Scribed by K. Sun; L.M. Wang; R.C. Ewing


Book ID
103862914
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
756 KB
Volume
266
Category
Article
ISSN
0168-583X

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✦ Synopsis


Both focused electron and ion beams (FEB and FIB) were used for fabricating patterned nano-/micro-structures on the surfaces of an iron phosphate glass (FePO). Periodically arranged, nano-sized holes/tubes/rings with their walls being made of Fe nanoparticles were fabricated by FEB direct writing. The diameters of the holes/tubes can be controlled by the beam size and dwell time, as well as by subsequent electron irradiation. Micro-and nano-sized patterns, also with Fe-nanoparticles sitting on the surfaces, were fabricated by FIB sputtering. These result in the possible exploitation of new applications of the glass, particularly in biomaterials, optical circuits, highdensity data storage, and controlling the growth of some nanowires/tubes.